Overview
A laser processing device, Callisto has been added to our product line up, to respond to the growing demand of the semiconductor and FPD market. Callisto is an easy to use for switching the wavelength, and the output wavelength is selectable for various processing purposes. The V-Technology’s original optical system layout allows the laser to output efficiently with the selected wavelength, enabling high precision laser processing.
The laser oscillator enables the repeated laser output power 100mJ or more per one pulse, in the wide range up to 60Hz from single shot. An area four times larger than before can be processed at high output power, and a standard equipped XY-θslit mechanism enables high precision control of laser processing. Moreover, flexible laser processing is realized using rhombus shaped slit (option). As sufficient consideration for the safety is taken, and the device is lead-free, and interlocks are provided in necessary places of the device, conforming to JIS6802.
Features
- High speed repeat laser oscillation 30Hz/ 60Hz.
- Multi wavelength oscillation 1064nm, 532nm, 355nm, 266nm.
- High power, large area laser processing.
- High grade laser processing.
- User friendly color LCD touch panel.
- High level of visibility by white LED light.
- High power, High precision adjustable unit.
- Reduction of disturbing factors by lightweight sealed chassis.
- Ease for maintenance structure.
- Equipped with RS232C or LAN interface.
Callisto series specification
| Name | Callisto | ||||
|---|---|---|---|---|---|
| Type | VL-C30 | VL-C60 | |||
| Laser Oscillator |
Oscillation | 1 – 30Hz single shot | 1 – 60Hz single shot | ||
| Wavelength Output (3mm square) |
R | 1064nm | 12mJ | ||
| G | 532nm | 8mJ | |||
| B | 355nm | 2mJ | |||
| V | 266nm | 1mJ | |||
| RG | 1064/532nm | 5/4mJ | |||
| GB | 532/355nm | 3/2mJ | |||
| GV | 532/266nm | 3/1mJ | |||
| RGB | 1064/532/355nm | 4/3/2mJ | |||
| RGV | 1064/532/266nm | 4/3/1mJ | |||
| RBV | 1064/355/266nm | 2/1/0.5mJ | |||
| RGBV | 1064/532/355/266nm | 2/1.5/1/0.5mJ | |||
| Oscillation system | Water-cooled, Internal circulation type Nd: YAG Laser |
||||
| Pulse width | 5 – 7 nsec | ||||
| Laser energy control | Hi / Lo ND-filter Attenuator 1000 Step |
||||
| Cable | Both sides detachable robot cable (Signal cable, High voltage cable, Cooling water tube) Standard length= 3M Extension cable (option) |
||||
| Slit | Carme 3Axis-θ | Max. 6mm-square X.Y Independently variable θ ± 45° (Square, Rectangle) |
|||
| Carme 4Axis-2θ | Max. 6mm-square X.Y Independently variable 2-axis independent rotation θ ± 45° (Rhomboid, Parallelogram) |
||||
| Operation Panel |
Touch panel Operation function |
Wavelength switching / Repetition frequency Setting / Output variable (Hi / Lo, ND-filter Attenuator 1000 Step) |
|||
| Operation button |
Emergency stop / Start key / Output jog dial / Laser shot /Slit joystick (Option) |
||||
| Cable | Signal Cable: Standard length = 3M, Extension code(option) |
||||
| Laser power supply
Cooling device |
Power system | IGBT power supply | |||
| External control | LAN / RS-232C | ||||
| Dimension / Weight | Laser Oscillator | 154(W) × 102.5(D) × 349(H)6kg | |||
| Slit | Carme 3Axis-θ | 154(W) × 120(D) × 79(H)1.6kg | |||
| Carme 4Axis-2θ | 154(W) × 120(D) × 115(H)2.6kg | ||||
| Power supply / Cooling | 350(W) × 455(D) × 350(H)28.5kg | ||||
| Operation panel | 350(W) × 206(D) × 45(H)2kg | ||||
| Power usage | AC 100V Single-phase 10A@30Hz / 15A@60Hz (with earth) | ||||
| Expendable supplies | Flash lamp, DI filter, Purified water | ||||
| Environment of usage | 20 degrees C 5 degrees C 30 – 60% (non condensing) Class 1000 recommend |
||||
- *This device is equipped with the safety measures which comply with JIS-C6802.
- *The product information is subject to change without notice.