Most of the Liquid Crystal Display (LCD), adopts the thin film transistor (TFT). In the case of wide type 42 inch TFT LCD TVs for high vision, to provide colorful and smooth images, it is necessary to produce TFTs over 6,000,000 on a glass substrate for one TV unit without any defects. In addition, LCD manufacturing system always requires high reliability and performance. Our AEGIS-TFT/CF*1 is the exposure for LCD which responds to these requirements.
*1 : TFT= Thin Film Transistor,CF = Color Filter: The exposure system is applied when patterns of electric circuits in semiconductor and LCD panel are exposed on the substrate. This system is essential to producing flat panel displays such as LCD and OEL display.
High alignment accuracy
High alignment accuracy ±1.5μm is realized by our core technologies ; identify previous patterns proceeded on the substrate and adjust position of photo mask, on which master pattern is drawn, to align previous patterns before expose in real time. (As of the end of September, 2011)
Resistant to dust and foreign objects. No common defects.
Unique scanning method limits the risk of common defects which is caused by particle on the photo mask.
Cost reduction by small size photo mask
As the photo mask size becomes larger, it results in high production cost and tends to be more expensive. In AEGIS, a small-size photo mask can be applied by small-size exposure light source and it leads to substantial cost reduction of the mask.
This system achieves high-precision and continuous exposure at a smooth and constant speed by adopting the airflow transfer, which is the technology to float a glass substrate with air and to transfer it continuously without contact. It successfully enhances the productivity, comparing to discontinuous exposure.